SFC-1580/1680 series is the high temperature version of compact digital Mass Flow Controllers. A separate control unit with heat proofed connection, a lower sensor heating temperature, and high temperature piezo-stack are used. A simple valve structure, which does not compress and expand gas, prevents re-condensation. FEATURES Higher operating temperature 150 °C Built-in structure to prevent recondensation Fast response < 1 sec flow

Worldwide, the Aera name is synonymous with high-quality, highperforming designs that are backed by exceptionally responsive customer service. FEATURES Multi-gas, multi-range selection Fast response All-metal seals Field programmable* Wide range of gas selection without recalibration* DeviceNet, RS-485, or analog control Multiple alarm and diagnostic capabilities RoHS compliant *Available in multi-gas, multi-range Transformer MFCs

Aera®FC-DR980 series digital MFCs (mass flow controllers) and MFMs (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use. FEATURES Multi-gas, multi-range selection* Analog, analog/digital, and digital modes Piezoelectric control valves Multipl alarm and dianostic capabilities Metal seals, with a 1 × 10-10 leak integrity Electropolished and ultra-clea

This highly advanced SAM® brand model with advanced sensor and valve technology, field-proven components and high-speed, digital circuitry delivers presice flow control even at very low flow rate down to 1 SCCM. Designed with field-proven components and high-speed digital circuitry, FX has achieved superior reliability performance with < 0,5 % zero drift over one year and superior repeatability of 0,06 % of full scale. Comprehensive commu

G4 models is the most advanced MFC meeting or exceeding the demand of the actual and also the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Pressure-insensitive operation Valve shut-off function In-line integrated flow verification system Self celibration function LCD display (temp, pressure, set, output) easifies control routines BENEFITS Great inlet pressure change insensitivity Allows on

Fitted between the cylinder and the regulator, preventing freezing inside the regulator.

These pressure regulators consist of cylinder connections, pressure regulator, inlet- and outlet gauges, diaphragm shut-off valve (Type -16) regulating valve (Type -18), relief valve, tube fitting on outlet. APPLICATION The FMD 320-14 is the base model. The FMD 320-16 permits shutting-off of the gas flow while maintaining the pressure regulator settings, the regulating valve on the FMD 320-18 enables a fine apportioning of the gas flow. Diap

Manual change-over gas supply manifold for non-corrosive gases and mixtures up to grade 6.0. For the connection of 2x1 cylinder with a maximum filling pressure of 200 bar. Diaphragm type regulator and isolation valve. Continous gas supply during cylinder change For wall mounting or gas cylinder cabinet mounting For inert, reactive, flammable and oxidizing gases and gas mixtures Excellent and accurate Pressure control Designed to minimize c

Manual change-over gas supply manifold for non-corrosive gases and mixtures up to grade 6.0. For the connection of 2×1 cylinder with a maximum filling pressure of 200 bar. Diaphragm type regulator and isolation valve. Continuous gas supply during cylinder change For wall mounting or gas cylinder cabinet mounting. For inert, reactive, flammable and oxidizing gases and gas mixtures Excellent and accurate Pressure control Designed to mi

This single-stage gas supply panel is mounted onto a stainless steel console and consists of a pressure regulator with inlet and outlet pressure gauges, shut-off valve and rupture disk. APPLICATION These gas supply panels are used for low flow rates of high purity gases and special gases. Process gas purging All connections welded or compatible with VCR® and Swagelok® products Pressure regulator with tied diaphragm Springless diap